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Release Time: 2021 - 05 - 12

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Release Time: 2021 - 04 - 01

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Release Time: 2021 - 03 - 16

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Release Time: 2016 - 07 - 21

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Release Time: 2016 - 07 - 21

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Release Time: 2016 - 07 - 21

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Release Time: 2016 - 07 - 19

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Release Time: 2016 - 07 - 13

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Inline Chemical Heater Performs Unmatched Semiconductor Process Fluid Heating

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Availability: 2021 - 05 - 12

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Inline Chemical Heater Performs Unmatched Semiconductor Process Fluid HeatingNow heat semiconductor process fluids up to 210°C!Flexible and custom configurationsIn addition to our standard configurations, the esPRECISEHEATER® Inline Heaters are also available in custom builds to meet your requirements. Our heaters have a variety of options to comply with your requirements, such as various connections, ground wires, controls, and model types (outlet T, U, Z, I and L or Special design S-Type). These heaters are drop-in and replace products to fit in your existing manufacturing equipment. Faster heatup: Single heater chamber sizes up to 18kW.Rapid installation: Customized plumbing connectionsLong heater life for reduced cost of ownership (COO):Patented ...

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Inline Chemical Heater Performs Unmatched Semiconductor Process Fluid Heating

Now heat semiconductor process fluids up to 210°C!

Inline Chemical Heater Performs Unmatched Semiconductor Process Fluid Heating

Flexible and custom configurations

In addition to our standard configurations, the esPRECISEHEATER® Inline Heaters are also available in custom builds to meet your requirements. Our heaters have a variety of options to comply with your requirements, such as various connections, ground wires, controls, and model types (outlet T, U, Z, I and L or Special design S-Type). These heaters are drop-in and replace products to fit in your existing manufacturing equipment.

Faster heatup: Single heater chamber sizes up to 18kW.

Rapid installation: Customized plumbing connections

Long heater life for reduced cost of ownership (COO):

Patented heater gas purge system continuously removes any chemical permeation and ensures long element life.

Long heater life and clean operating: Patented heater gas purge system continuously removes chemical permeation and ensures exceptionally long element life. This system also protects against any potential ionic contamination of the chemistry.

Rugged construction: Thick walled chamber provides long service life in the harshest high temperature applications.

Exceptionally clean performance: Thick fluoropolymersheath minimizes permeation. Element purge monitoring minimizes ionic contamination potential. Cleanroom assembly and testing ensures the highest manufacturing standards.

Outstanding chemical compatibility: All fluoropolymerwetted parts compatible with virtually any chemistry.

Excellent temperature stability: Low watt density design enables accurate control of process temperature.

Applications Include:

SC1: ammonium hydroxide (NH4OH), and hydrogen peroxide (H2O2)
SC2: hydrochlorice acid (HCl) and hydrogen peroxide Buffered oxide etch (BOE) process: hydrofluoric acid (HF) and ammonim fluoride (NH4F)

Nitride etch/strip: phosphoric acid (H3PO4)Various acids such as:

Hydrochloric (HCl)

Hydrofluoric (HF)

Acetic (C2H4O2)

Nitric (HNO3)

Sulfuric (H2SO4)

Sulfuric acid and hydrogen peroxide

Sulfuric acid and ozone (O3)

Hydrofluoric acid and glycol (C2H6O2)

Potassium hydroxide (KOH)

Sodium hydroxide (NaOH)

Electroless nickel Electroless copper Electroless gold Deionized water

Some solvents (consult factory)

Benefits and Specifications

Unmatched heating of semiconductor process fluids upto 210°C.
Patented heater gas purge system ensures long element life and reduced cost of ownership.
Thick walled chamber provides long service life in the harshest high temperature applications.
Element purge monitoring minimizes ionic contamination potential. Cleanroom assembly and testing ensures the highest manufacturing standards.
All fluoropolymer wetted parts provide outstandingcompatibility with virtually any chemistry.
Low watt density design enables precise and stable control of process temperature.
PVDF high temperature mounting brackets (Hightemperature model)
Options:

Horizontally mounted configuration
Integral cooling coils
100 ohm RTDs or “J”, “K”, or “E” type process and
element thermocouples
Lower watt density heaters for special applications

Specifications:

Service:
• Inline chemical heater with all fluoropolymer wetted

surfaces for virtually any wet chemistry application.

Temperature Range: Up to 210°C.

Maximum Working Pressure:

• 100 PSIG (7 Bar) at 25oC

• 43 PSIG (. Bar) at 180oC

Heater Sizes: 1,000 watts up to 18,000 watts

Heater Voltages Available:
• 200 to 600 volts, single or three phase (12kW and

larger requires three phase).

Watt Density: 10 watts per square inch (1.5w/cm2)

Fluid Connections Available:
• 1⁄4” (6mm) to 1” (25mm) flared
• 1⁄2” (12mm) to 1” (25mm) Super 300 Type Pillar®•

Other connections available, consult factory

Third Party Certificatons: CE, UL, Semi S2 and S3

Element Purge:
• Small amount of clean dry air (CDA) or N2 gas flows

between the metal grounded element and the PTFE sheath

Applications

Semiconductor Wet Processes

Sterilization/Cleaning

Solar/Photovoltaic Wafer Cleaning

Safety Features

Liquid level sensor
Ground wire options
Over-temperature thermocouple
Process thermocouple
Options
Thermal cutoff
Thermocouples
Fiber-optic liquid level sensor
RTD sensors
Pressure relief valve

Model	LP1	LP7
Wetted Material	PVDF/PFA	PVDF/PFA
Housing Material	Pipe	Pipe
Max Temp	95°C	95°C
Pressure	60 psi at 95°C	60 psi at 95°C
Power*	1-15 kW	1-18 kW
Accuracy	± 0.1o C	± 0.1o C
Voltages**	200-480 VAC, 1 and 3-phase	200-600 VAC, 1 and 3-phase
Flow	0.5-32 gpm (1.9-122 L/min)	0.5-32 gpm (1.9-122 L/min)
Benefits	Variable height	Higher flow, kW

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PFA Immersion Tank Heaters- Industrial Tank Immersion Heaters

Release Time: 2009 - 12 - 30

PFA Immersion Tank Heaters- Industrial Tank Immersion HeatersProduct DescriptionPFA Immersion Frame Heaters are great for heating fluid baths to a constant temperature Markets SemiconductorLife SciencesIndustrialApplicationsFluid Heating Fluoropolymer Sleeve Heating Element Quality resistance element is sleeved in braided material for even coil separation. The entire element is given an outer sleeving of pretested and pre-extruded fluoropolymer tubing. THIS IS NOT A COATED PRODUCT.Over-temperature Thermocouple The over-temperature cutoff device protects the integrity of the fluoropolymer heater. If an opera- tor should leave the heater on while draining or aspirating a tank, when used in conjunction with a temperature control device, it will automatically shut off the ...

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